000 00664nam a2200217 a 4500
001 66984
003 BD-RjUL
005 20211209081613.0
008 170321s1965 nyua b 00110 eng d
035 _a(BD-RjUL)67115
040 _aDLC
_cWSU
_dSER
_dMYG
_dBD-RjUL
_beng
041 _aeng
082 _223
_a621.55
_bLEF 1965
100 1 _aLewin, Gerhard.
_9198364
245 1 0 _aFundamentals of Vacuum Science and Technology /
_cGerhard Lewin.
260 0 _aNew York :
_bMcGraw-Hill book Company,
_cc1965.
300 _axiii, 248 p. :
_bill. ;
_c23 cm.
504 _aIncludes bibliographies and references.
650 0 _aVacuum technology.
_9198365
942 _2ddc
_cBK
999 _c66984
_d66984