TY  - BOOK
AU  - Oechsner,H.
AU  - Etzkorn,H.W.
TI  - Thin-film and depth-profile analysis
SN  - 0387133208 (U.S.)
U1  - 530.41 19
PY  - 1984///
CY  - Berlin, New York
PB  - Springer-Verlag
KW  - Thin films
KW  - Surfaces
KW  - Surface chemistry
KW  - Sputtering (Physics)
N1  - Catalogong based on CIP information; Includes bibliographical references and index
ER  -