Thin-film and depth-profile analysis / 
edited by H. Oechsner ; with contributions by H.W. Etzkorn ... [et al.]. 
 - Berlin :  New York :  Springer-Verlag,  c1984. 
 - 205 p. :   ill. ;   23 cm.  
<br/><br/> Catalogong based on CIP information. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0387133208 (U.S.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films--Surfaces.<br/>Surface chemistry.<br/>Sputtering (Physics)
<br/><br/><label>Dewey Class. No.: </label>530.41  / THI 1984