TY  - BOOK
AU  - Yarwood,John
AU  - Andersson,P.
ED  - Symposium on Vacuum and Thin Film Technology
TI  - Vacuum and thin film technology: proceedings of an international symposium held at the University of Uppsala, Sweden, 31st August-3rd September 1976 
SN  - 0080221122
U1  - 621.38152 23
PY  - 1976///
CY  - Oxford, NEW YORK
PB  - Pergamon
KW  - Thin films
KW  - Congresses
KW  - Vacuum technology
N1  - "Published as a special issue of the journal Vacuum, Volume 27, No. 3/4."; Includes bibliographical references
ER  -