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  <titleInfo>
    <title>Vacuum and thin film technology</title>
    <subTitle>proceedings of an international symposium held at the University of Uppsala, Sweden, 31st August-3rd September 1976</subTitle>
  </titleInfo>
  <name type="conference">
    <namePart>Symposium on Vacuum and Thin Film Technology (1976 : University of Uppsala)</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
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  </name>
  <name type="personal">
    <namePart>Yarwood, John.</namePart>
  </name>
  <name type="personal">
    <namePart>Andersson, P.</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <genre authority="marc">conference publication</genre>
  <originInfo>
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    <place>
      <placeTerm type="text">Oxford</placeTerm>
    </place>
    <place>
      <placeTerm type="text">NEW YORK</placeTerm>
    </place>
    <publisher>Pergamon</publisher>
    <dateIssued>1976</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>vi, p. 85-412 : ill. ; 28 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">edited by J. Yarwood and P. Andersson.</note>
  <note>"Published as a special issue of the journal Vacuum, Volume 27, No. 3/4."</note>
  <note>Includes bibliographical references.</note>
  <subject authority="lcsh">
    <topic>Thin films</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Vacuum technology</topic>
    <topic>Congresses</topic>
  </subject>
  <classification authority="ddc" edition="23">621.38152 SYV 1976</classification>
  <identifier type="isbn">0080221122</identifier>
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