01005nam a2200253 a 450000100060000000300080000600500170001400800410003102000150007203500190008704000320010604100080013808200280014611100820017424501970025626000430045330000360049650000780053250400410061065000280065165000350067970000190071470000180073368162BD-RjUL20211209081734.0170330s1976    enka     b    100 0 eng d  a0080221122  a(BD-RjUL)68372  aUIUcUIUdMYGdBD-RjULbeng  aeng  223a621.38152bSYV 19762 aSymposium on Vacuum and Thin Film Technologyd(1976 :cUniversity of Uppsala)00aVacuum and thin film technology :bproceedings of an international symposium held at the University of Uppsala, Sweden, 31st August-3rd September 1976 /cedited by J. Yarwood and P. Andersson.  aOxford ;aNEW YORK :bPergamon,c1976.  avi, p. 85-412 :bill. ;c28 cm.  a"Published as a special issue of the journal Vacuum, Volume 27, No. 3/4."  aIncludes bibliographical references. 0aThin filmsvCongresses. 0aVacuum technologyvCongresses.1 aYarwood, John.1 aAndersson, P.