TY  - BOOK
AU  - Grovenor,C.R.M.
TI  - Microelectronic materials
SN  - 0852742703 (pbk.)
U1  - 621.381 23
PY  - 1989///
CY  - Bristol
PB  - Adam Hilger
KW  - Microelectronics
N1  - Includes index
ER  -