TY  - BOOK
AU  - Burger,R.M.
AU  - Donovan,R.P.
TI  - Fundamentals of silicon integrated device technology
T2  - Solid state physical electronics series
U1  - 621.3815 
PY  - 1967///
CY  - Englewood Cliffs, N.J.
PB  - Prentice-Hall
KW  - Microelectronics
KW  - Silicon
N1  - Includes bibliographies and index; v. 1 Oxidation, diffusion, and epitaxy
ER  -