TY  - BOOK
AU  - Maissel,Leon I.
AU  - Glang,Reinhard
TI  - Handbook of thin film technology
T2  - McGraw-Hill handbooks
U1  - 621.38173 
PY  - 1970/// [reissue 1983]
CY  - New York
PB  - McGraw-Hill
KW  - Thin film devices
N1  - Includes bibliographical reference and index
ER  -