TY - BOOK AU - Roth,A. TI - Vacuum technology SN - 0444108017 (Elsevier) U1 - 621.55 PY - 1976/// CY - Amsterdam, New York, New York PB - North-Holland Pub. Co., sole distributors for the U.S.A. and Canada, American Elsevier Pub. Co. KW - Vacuum technology N1 - Includes Bibliography: p. 453-482 and index ER -